High Density Plasma

Views Updated: Dec 15, 2025

Key Facts

Abbreviation
HDP
Pronunciation
/haɪ ˈdɛnsɪti ˈplæzmə/
Category
Academic & Science
Related Field
Electronics

Examples in Context

  1. The results show that the ECR plasma source may generate stable, high density plasma with low electron temperature.
  2. Collision absorption at microwave window and resonance absorption at ECR region produce high density plasma at high pressure.
  3. Plasma diagnostics techniques is important for controlling of high density plasma etching process.
  4. Endpoint Detection in High Density Plasma(HDP) Etching System
  5. In this article, with a self-consistent fluid model, we study the transport characteristics of the rf sheath in low pressure, high density plasma, and a Monte Carlo ( MC ) method is applied to calculate the IAD at the electrode.

Other meanings of HDP