LOCal Oxidation Of Silicon

Views Updated: Dec 15, 2025

Key Facts

Abbreviation
LOCOS
Pronunciation
/ˈloʊkəl ˌɑksəˈdeɪʃən əv ˈsɪləkən/
Category
Academic & Science
Related Field
Electronics

Examples in Context

  1. Local oxidation of silicon on sapphire
  2. Nanometer scale Patterning Fabricated by Selecting Local Oxidation of Silicon Surface Using Scanning Tunneling Microscope