Proximity Effect Correction

Views Updated: Dec 15, 2025

Key Facts

Abbreviation
PEC
Pronunciation
/prɑkˈsɪməti ˈifɛkt kərˈɛkʃən/
Category
Miscellaneous
Related Field
Unclassified

Examples in Context

  1. Furthermore, the parameters acquired by this method are successfully used for proximity effect correction in electron beam lithography on the same experimental conditions.
  2. Study of Internal Proximity Effect Correction(PEC) in Electron-Beam Lithograph
  3. The scanning and the correction method proposed in the paper can provide a new method of three-dimensional fabrication and proximity effect correction for e-beam system.
  4. Design for manufacturing by the core for resolution enhancement technology / optical proximity effect correction is introduced.
  5. It was proved that the results of the simulation can be used to guide the experiment. 3. The production mechanism of proximity effect and effective approaches of proximity effect correction were investigated.

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