Reactive Ion Etching

Views Updated: Dec 15, 2025

Key Facts

Abbreviation
RIE
Pronunciation
/riˈæktɪv aɪən ˈɛʧɪŋ/
Category
Academic & Science
Related Field
Electronics

Examples in Context

  1. An Investigation of Reactive Ion Etching(RIE) for Through Silicon Via Packaging Technology
  2. Inductively coupled plasma reactive ion etching of InSb photovoltaic detector arrays
  3. Study on fabrication of silicon-based photon crystal slab with lithography and reactive ion etching is carried out.
  4. Reactive ion etching of polysilicon using SF6 + Ar reactive gas is investigated.
  5. CH_4 / H_2 mixtures can be used for reactive ion etching of InP at room temperature.

Other meanings of RIE

Recognised Investment Exchange Business
Register In Education Community
Resources In Education Community
Review of International Economics Community
Regional Information Exchange Regional
Research In Education Academic
Resouces For Infant Education Community
Receive Interrupt Enable Misc
Regional Institute Of Education Gov
Right Inboard Elevon Gov