Secondary Ion Mass Spectroscopy

Views Updated: Dec 15, 2025

Key Facts

Abbreviation
SIMS
Pronunciation
/ˈsɛkənˌdɛri aɪən mæs spɛkˈtrɑskəpi/
Category
Academic & Science
Related Field
Electronics

Examples in Context

  1. Study of Quantitative Analysis of Vanadium in SiC by Secondary Ion Mass Spectroscopy(SIMS); any of several toxic or carcinogenic hydrocarbons that occur as impurities in herbicides.
  2. Deuterium oxide absorption distribution was measured by time of flight secondary ion mass spectroscopy ( ToF-SIMS ).
  3. An experiment was conducted to study the high-temperature annealing characteristics of polysilicon films using atomic force microscope, secondary ion mass spectroscopy and probe.
  4. Investigating progress of hydrogen release during plastic deformation and hydrogen diffusivity under high vacuum, hydrogen distribution in hulks and hydride formation at crack tips, hydrogen segregation at grain boundaries and quantitative hydrogen analysis have been presented using Secondary Ion Mass Spectroscopy(SIMS) ( SIMS ).
  5. The enhanced adhesion of Cu films on Si substrates under MeV Cl ion beam irradiation was studied through analysis of Scanning Auger Microprobe ( SAM ) and Secondary Ion Mass Spectroscopy(SIMS) ( SIMS ).

Other meanings of SIMS