Low Pressure Chemical Vapor Deposition

Views Updated: Dec 15, 2025

Key Facts

Abbreviation
LPCVD
Pronunciation
/loʊ ˈprɛʃər ˈkɛmɪkəl ˈveɪpər ˌdɛpəˈzɪʃən/
Category
Academic & Science
Related Field
Electronics

Examples in Context

  1. Synthesis of Carbon Nanotubes by Low Pressure Chemical Vapor Deposition(LPCVD) and Their Applications
  2. Nano-sized silicon films with large area were prepared by normal Low Pressure Chemical Vapor Deposition(LPCVD) method.
  3. In this paper CNT film was deposited on metal substrate by low temperature and low pressure chemical vapor deposition ( CVD ). Field emission cathode was made by thin-film and thick-film process.
  4. Acetylene Flow Rate Effect on Morphology and Structure of Carbon Nanotube Thick Films by Low Pressure Chemical Vapor Deposition(LPCVD)
  5. Growth Rate and Surface Morphology of Silicon Nitride Thin Films by Low Pressure Chemical Vapor Deposition(LPCVD)

Other meanings of LPCVD

Low Pressure Chemical Vapor Academic
Low pressure chemical vapour deposition Academic