Low pressure chemical vapour deposition
Key Facts
Abbreviation
LPCVD
Pronunciation
/ˌloʊ ˈprɛʃər ˈkɛmɪkəl ˈveɪpər dɪˈpɒzɪʃən/
Category
Academic & Science
Related Field
Chemistry
Examples in Context
- This thesis was based on unexpensive chemic fabrication. The silica opal was fabricated by convection self-assembly methods and the silica opal was filled with silicon by low pressure chemical vapour deposition ( LPCVD ). Finally silicon inverse opal was fabricated.
- The Effect of Bias on Low Pressure Plasma-Enhanced Chemical Vapour Deposition of TiO_2 Film and its Structure and Performance
Other meanings of LPCVD
Low Pressure Chemical Vapor
Academic