Low pressure chemical vapour deposition

Views Updated: Dec 15, 2025

Key Facts

Abbreviation
LPCVD
Pronunciation
/ˌloʊ ˈprɛʃər ˈkɛmɪkəl ˈveɪpər dɪˈpɒzɪʃən/
Category
Academic & Science
Related Field
Chemistry

Examples in Context

  1. This thesis was based on unexpensive chemic fabrication. The silica opal was fabricated by convection self-assembly methods and the silica opal was filled with silicon by low pressure chemical vapour deposition ( LPCVD ). Finally silicon inverse opal was fabricated.
  2. The Effect of Bias on Low Pressure Plasma-Enhanced Chemical Vapour Deposition of TiO_2 Film and its Structure and Performance

Other meanings of LPCVD