Low Pressure Chemical Vapor
Key Facts
Abbreviation
LPCVD
Pronunciation
/loʊ ˈprɛʃər ˈkɛmɪkəl ˈveɪpər/
Category
Academic & Science
Related Field
Chemistry
Examples in Context
- Synthesis of Carbon Nanotubes by Low Pressure Chemical Vapor(LPCVD) Deposition and Their Applications
- Nano-sized silicon films with large area were prepared by normal Low Pressure Chemical Vapor(LPCVD) Deposition method.
- The Model and Simulation of Low Pressure Chemical Vapor(LPCVD) Deposition
- In this paper CNT film was deposited on metal substrate by low temperature and low pressure chemical vapor deposition ( CVD ). Field emission cathode was made by thin-film and thick-film process.
- Acetylene Flow Rate Effect on Morphology and Structure of Carbon Nanotube Thick Films by Low Pressure Chemical Vapor(LPCVD) Deposition